This system to research and develop and produce designs, sputtering shop characteristics long-term reliable, with deposited metal thin film and dielectric membrane. This system has provided the sputtering system standard function in the very compact space. Is bigger than 100mm in the diameter the region to be possible to carry on the film thickness even deposition. The computer touchscreen provided a friendly operation contact surface to use by the connection parameter control and the system regulation memory.application: (1) deposited metal material (2) deposition medium material the (3) reactive sputtering deposits the (4) co-sputtering to deposit
